@inproceedings{7efd693cb138452a925bfe00eeed56bb,
title = "Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing",
abstract = "A wafer-level fabrication process of polydimethylsiloxane (PDMS) membranes with integrated strain gauges for low-pressure sensing is developed. The device is proposed as an alternative approach and a first step towards a high-throughput platform to electrically monitor the contractility of heart cells on a silicon chip. Titanium strain gauges are successfully integrated on a 12 μm-thick PDMS membrane that acts as a flexible substrate for heart cells culturing. Electrical measurements show a relative resistance change of approximately 5\% for membranes subjected to variable pressure up to 1 kPa. This demonstrates the suitability of the sensing principle for monitoring typical micron-range contractions of heart cells. Both the membranes and strain gauges are fabricated using conventional photolithography and MEMS fabrication techniques, providing high-throughput and IC manufacturing compatibility as required for its envisioned large scale application in drug testing and cell biology study.",
keywords = "Cell Culture, Heart Cell, PDMS Membrane, Pressure, Resistance, Strain-Gauge",
author = "Quiros-Solano, \{W. F.\} and G. Pandraud and Sarro, \{P. M.\}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 14th IEEE SENSORS ; Conference date: 01-11-2015 Through 04-11-2015",
year = "2015",
month = dec,
day = "31",
doi = "10.1109/ICSENS.2015.7370690",
language = "Ingl{\'e}s",
series = "2015 IEEE SENSORS - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 IEEE SENSORS - Proceedings",
}