Design and Simulation of a Piezoelectric Actuated Valveless Micropump

In this work, we design and simulate a valve less, diaphragm-based, piezoelectric micro pump. The piezoelectric actuator is a PZT-5H piezo-disk, the diaphragm is a borosilicate glass plate. All the simulations were made using COMSOL Multiphysics software. First, the piezoelectric actuator and membrane thicknesses were chosen by means of a stationary simulation, using the piezoelectric devices module we simulate the deformation of the membrane under different voltages, using different combinations of membrane and piezo actuator thicknesses. From the obtained results we decided to use a 100 µm membrane and a 50 µm piezo actuator. Using this geometry we build a simplified symmetric 3D model to be used in the pump simulation. A complete system simulation with one way coupling between the piezoelectric devices module and the fluid structure interaction module was made. It is considered to have no back-pressure. The results obtained for inlet, outlet and net flow are showed in this document.